Chemical physics of thin film deposition processes for micro- and nano-technologies

Author(s)

    • NATO advanced study institute on chemical physics of thin film deposition processes for micro-and nano-technologies

Bibliographic Information

Chemical physics of thin film deposition processes for micro- and nano-technologies

edited by Yves Pauleau

（NATO science series, Sub-series II, Mathematics, physics and chemistry ; v. 55）

Kluwer Academic, c2002

  • : pb

Other Title

Proceedings of the NATO advanced study institute on chemical physics of thin film deposition processes for micro-and nano-technologies, Kaunas, Lithuania, 3-14 September, 2001

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Note

Includes index

Related Books： 1-1 of 1

Details

  • NCID
    BA57112551
  • ISBN
    • 1402005245
    • 1402005253
  • Country Code
    ne
  • Title Language Code
    eng
  • Text Language Code
    eng
  • Place of Publication
    Dordrecht
  • Pages/Volumes
    xiii, 363 p.
  • Size
    25 cm
  • Parent Bibliography ID
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