Chemical physics of thin film deposition processes for micro- and nano-technologies

著者

• Pauleau, Y.
• NATO advanced study institute on chemical physics of thin film deposition processes for micro-and nano-technologies

書誌事項

Chemical physics of thin film deposition processes for micro- and nano-technologies

edited by Yves Pauleau

（NATO science series, Sub-series II, Mathematics, physics and chemistry ; v. 55）

Kluwer Academic, c2002

• : pb

タイトル別名

Proceedings of the NATO advanced study institute on chemical physics of thin film deposition processes for micro-and nano-technologies, Kaunas, Lithuania, 3-14 September, 2001

注記

Includes index

詳細情報

• NII書誌ID(NCID): BA57112551
• ISBN:
  • 1402005245
  • 1402005253
• 出版国コード: ne
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Dordrecht
• ページ数/冊数: xiii, 363 p.
• 大きさ: 25 cm
• 親書誌ID:
  • BA40559140