17th European Conference on Mask Technology for Integrated Circuits and Microcomponents

Author(s)

• European Conference on Mask Technology for Integrated Circuits and Microcomponents

Bibliographic Information

17th European Conference on Mask Technology for Integrated Circuits and Microcomponents

Uwe F.W. Behringer, chair/editor ; organized by VDE/VDI-Society and Institute for Microstructure Technology (GMM)(Germany)

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 4349）

SPIE, c2001

Note

Includes bibliographical references and indexes

"13-24 November 2000, Munich, Germany"

Details

• NCID: BA58680990
• ISBN:
  • 0819440396
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: [Bellingham, Wash.]
• Pages/Volumes: x, 192 p.
• Size: 28 cm
• Parent Bibliography ID:
  • BA0022700X