17th European Conference on Mask Technology for Integrated Circuits and Microcomponents

著者

• European Conference on Mask Technology for Integrated Circuits and Microcomponents

書誌事項

17th European Conference on Mask Technology for Integrated Circuits and Microcomponents

Uwe F.W. Behringer, chair/editor ; organized by VDE/VDI-Society and Institute for Microstructure Technology (GMM)(Germany)

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 4349）

SPIE, c2001

注記

Includes bibliographical references and indexes

"13-24 November 2000, Munich, Germany"

詳細情報

• NII書誌ID(NCID): BA58680990
• ISBN:
  • 0819440396
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: [Bellingham, Wash.]
• ページ数/冊数: x, 192 p.
• 大きさ: 28 cm
• 親書誌ID:
  • BA0022700X