Crystalline defects and contamination: their impact and control in device manufacturing III : DECON 2001 : proceedings of the Satellite Symposium to ESSDERC 2001, Nuremberg, Germany

Author(s)

• Symposium on Crystalline Defects and Contamination: their Impact and Control in Device Manufacturing
• Kolbesen, Bernd O.
• Electrochemical Society. Electronics Division
• European Solid State Device Research Conference

Bibliographic Information

Crystalline defects and contamination: their impact and control in device manufacturing III : DECON 2001 : proceedings of the Satellite Symposium to ESSDERC 2001, Nuremberg, Germany

editors, B.O. Kolbesen ... [et al.]

（Proceedings / [Electrochemical Society], v. 2001-29）

Electrochemical Society, c2001

Note

Includes bibliographic references and indexes

Details

• NCID: BA59030458
• ISBN:
  • 1566773636
• LCCN: 2001092045
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Pennington, N.J.
• Pages/Volumes: x, 362 p.
• Size: 24 cm
• Parent Bibliography ID:
  • BA01323290