Crystalline defects and contamination: their impact and control in device manufacturing III : DECON 2001 : proceedings of the Satellite Symposium to ESSDERC 2001, Nuremberg, Germany

著者

• Symposium on Crystalline Defects and Contamination: their Impact and Control in Device Manufacturing
• Kolbesen, Bernd O.
• Electrochemical Society. Electronics Division
• European Solid State Device Research Conference

書誌事項

Crystalline defects and contamination: their impact and control in device manufacturing III : DECON 2001 : proceedings of the Satellite Symposium to ESSDERC 2001, Nuremberg, Germany

editors, B.O. Kolbesen ... [et al.]

（Proceedings / [Electrochemical Society], v. 2001-29）

Electrochemical Society, c2001

注記

Includes bibliographic references and indexes

詳細情報

• NII書誌ID(NCID): BA59030458
• ISBN:
  • 1566773636
• LCCN: 2001092045
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Pennington, N.J.
• ページ数/冊数: x, 362 p.
• 大きさ: 24 cm
• 親書誌ID:
  • BA01323290