Microfabricated systems and MEMS VI : proceedings of the international symposium

Author(s)

• Microfabricated Systems and MEMS
• Electrochemical Society. Meeting
• Hesketh, P. J.
• Electrochemical Society. Sensor Division

Bibliographic Information

Microfabricated systems and MEMS VI : proceedings of the international symposium

editors, P.J. Hesketh ... [et al.]

（Proceedings / [Electrochemical Society], v. 2002-6）

Electrochemical Society, c2002

Note

"... held at the 202nd Meeting of the Electrochemical society, May 12-17th, 2002, in Philadelphia, PA"--on pref

Includes bibliographical references and indexes

Details

• NCID: BA59031337
• ISBN:
  • 1566773725
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Pennington, N.J.
• Pages/Volumes: viii, 252 p.
• Size: 24 cm
• Parent Bibliography ID:
  • BA01323290