Microfabricated systems and MEMS VI : proceedings of the international symposium

著者

• Microfabricated Systems and MEMS
• Electrochemical Society. Meeting
• Hesketh, P. J.
• Electrochemical Society. Sensor Division

書誌事項

Microfabricated systems and MEMS VI : proceedings of the international symposium

editors, P.J. Hesketh ... [et al.]

（Proceedings / [Electrochemical Society], v. 2002-6）

Electrochemical Society, c2002

注記

"... held at the 202nd Meeting of the Electrochemical society, May 12-17th, 2002, in Philadelphia, PA"--on pref

Includes bibliographical references and indexes

詳細情報

• NII書誌ID(NCID): BA59031337
• ISBN:
  • 1566773725
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Pennington, N.J.
• ページ数/冊数: viii, 252 p.
• 大きさ: 24 cm
• 親書誌ID:
  • BA01323290