MEMS components and applications for industry, automobiles, aerospace, and communication : 22-23 October 2001, San Francisco, USA

著者

• Helvajian, Henry
• Janson, Siegfried W.
• Lärmer, Franz
• Society of Photo-optical Instrumentation Engineers
• United States. Defense Advanced Research Projects Agency

書誌事項

MEMS components and applications for industry, automobiles, aerospace, and communication : 22-23 October 2001, San Francisco, USA

Henry Helvajan, Siegfried W. Janson, Franz Lärmer, chair/editor ; sponsored and published by SPIE--The International Society for Optical Engineering ; cosponsored by DARPA--Defense Advanced Research Projects Agency (USA)

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 4559）

SPIE, c2001

注記

Includes bibliographical references and index

詳細情報

• NII書誌ID(NCID): BA59269088
• ISBN:
  • 0819442879
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Bellingham, Wash.
• ページ数/冊数: xxvii, 190 p.
• 大きさ: 28 cm
• 親書誌ID:
  • BA0022700X