15th European Conference on Mask Technology for Integrated Circuits and Microcomponents '98 : 16-17 November 1998, Munich-Unterhaching, Germany

Author(s)

• European Conference on Mask Technology for Integrated Circuits and Microcomponents (15th : 1998 : Munich-Unterhaching, Germany)
• Behringer, Uwe
• VDE/VDI-Gesellschaft für Mikroelektronik, Mikro- und Feinwerktechnik
• Forschungszentrum Karlsruhe. Institute for Microstructure Technology
• SEMI-Europe
• BACUS (Technical Group)
• Society of Photo-optical Instrumentation Engineers

Bibliographic Information

15th European Conference on Mask Technology for Integrated Circuits and Microcomponents '98 : 16-17 November 1998, Munich-Unterhaching, Germany

Uwe Behringer, chair/editor ; organized by VDE/VDI-Society Microelectronics, Micro- and Precision Engineering (GMM) (Germany), Institute for Microstructure Technology/Forschungszentrum Karlsruhe GmbH (Germany) ; cooperating organizations, SEMI-Europe--Semiconductor Equipment and Materials International, BACUS (USA), SPIE--the International Society for Optical Engineering

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 3665）

SPIE, c1999

Other Title

Fifteenth European Conference on Mask Technology for Integrated Circuits and Microcomponents

European Conference on Mask Technology for Integrated Circuits and Microcomponents

Mask technology for integrated circuits and microcomponents

Note

Includes bibliographical references and index

Details

• NCID: BA60525844
• ISBN:
  • 0819431397
• LCCN: 00268121
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Bellingham, Wash.
• Pages/Volumes: ix, 180 p.
• Size: 28 cm
• Classification:
  • LCC : TK7872.M3
  • DC21 : 621.3815
• Subject Headings:
  • LCSH : Integrated circuits -- Masks -- Congresses
  • LCSH : Microlithography -- Congresses
  • LCSH : X-ray lithography -- Congresses
• Parent Bibliography ID:
  • BA0022700X