15th European Conference on Mask Technology for Integrated Circuits and Microcomponents '98 : 16-17 November 1998, Munich-Unterhaching, Germany

著者

• European Conference on Mask Technology for Integrated Circuits and Microcomponents (15th : 1998 : Munich-Unterhaching, Germany)
• Behringer, Uwe
• VDE/VDI-Gesellschaft für Mikroelektronik, Mikro- und Feinwerktechnik
• Forschungszentrum Karlsruhe. Institute for Microstructure Technology
• SEMI-Europe
• BACUS (Technical Group)
• Society of Photo-optical Instrumentation Engineers

書誌事項

15th European Conference on Mask Technology for Integrated Circuits and Microcomponents '98 : 16-17 November 1998, Munich-Unterhaching, Germany

Uwe Behringer, chair/editor ; organized by VDE/VDI-Society Microelectronics, Micro- and Precision Engineering (GMM) (Germany), Institute for Microstructure Technology/Forschungszentrum Karlsruhe GmbH (Germany) ; cooperating organizations, SEMI-Europe--Semiconductor Equipment and Materials International, BACUS (USA), SPIE--the International Society for Optical Engineering

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 3665）

SPIE, c1999

タイトル別名

Fifteenth European Conference on Mask Technology for Integrated Circuits and Microcomponents

European Conference on Mask Technology for Integrated Circuits and Microcomponents

Mask technology for integrated circuits and microcomponents

注記

Includes bibliographical references and index

詳細情報

• NII書誌ID(NCID): BA60525844
• ISBN:
  • 0819431397
• LCCN: 00268121
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Bellingham, Wash.
• ページ数/冊数: ix, 180 p.
• 大きさ: 28 cm
• 分類:
  • LCC : TK7872.M3
  • DC21 : 621.3815
• 件名:
  • LCSH : Integrated circuits -- Masks -- Congresses
  • LCSH : Microlithography -- Congresses
  • LCSH : X-ray lithography -- Congresses
• 親書誌ID:
  • BA0022700X