Lithography for semiconductor manufacturing : 19-21 May 1999, Edinburgh, Scotland

著者

• Mack, Chris A.
• Stevenson, Tom, Dr
• European Optical Society

書誌事項

Lithography for semiconductor manufacturing : 19-21 May 1999, Edinburgh, Scotland

Chris A. Mack, Tom Stevenson, chairs/editors ; sponsored by EOS--European OPtical Society ... [et al.]

（Proceedings EurOpt series）（Proceedings / SPIE -- the International Society for Optical Engineering, 3741）

SPIE, c1999

注記

Includes bibliographical references and index

詳細情報

• NII書誌ID(NCID): BA60527894
• ISBN:
  • 0819432210
• LCCN: 00502114
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Bellingham, Wash.
• ページ数/冊数: vii, 262 p.
• 大きさ: 28 cm
• 分類:
  • LCC : TK7874
  • DC21 : 621.3815/2
• 件名:
  • LCSH : Integrated circuits -- Design and construction -- Congresses
  • LCSH : Semiconductors -- Etching -- Congresses
  • LCSH : Microlithography -- Congresses
• 親書誌ID:
  • BA31190072
  • BA0022700X