Surface characterization for computer disks, wafers, and flat panel displays : 28 January 1999, San Jose, California

Author(s)

    • Stover, John C.

Bibliographic Information

Surface characterization for computer disks, wafers, and flat panel displays : 28 January 1999, San Jose, California

John C. Stover, chair/editor

(Proceedings / SPIE -- the International Society for Optical Engineering, 3619)

SPIE, c1999

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Includes bibliographical references and index

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    SPIE -- the International Society for Optical Engineering

    SPIE -- the International Society for Optical Engineering

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