Surface characterization for computer disks, wafers, and flat panel displays : 28 January 1999, San Jose, California

著者

    • Stover, John C.

書誌事項

Surface characterization for computer disks, wafers, and flat panel displays : 28 January 1999, San Jose, California

John C. Stover, chair/editor

（Proceedings / SPIE -- the International Society for Optical Engineering, 3619）

SPIE, c1999

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注記

Includes bibliographical references and index

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  • Proceedings

    SPIE -- the International Society for Optical Engineering

    SPIE -- the International Society for Optical Engineering

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