Surface scattering and diffraction for advanced metrology : 1 August 2001 San Diego, USA

著者

• Society of Photo-optical Instrumentation Engineers
• Gu, Zu-Han
• Maradudin, A. A.

書誌事項

Surface scattering and diffraction for advanced metrology : 1 August 2001 San Diego, USA

Zu-Han Gu, Alexei A. Maradudin chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 4447）

SPIE, c2001

注記

Includes index

詳細情報

• NII書誌ID(NCID): BA60568574
• ISBN:
  • 0819441619
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Bellingham, Wash.
• ページ数/冊数: vii, 164 p.
• 大きさ: 28 cm
• 親書誌ID:
  • BA0022700X