Laser applications in microelectronic and optoelectronic manufacturing V : 24-26 January 2000, San Jose, USA

著者

    • Helvajian, Henry
    • United States. Air Force. Office of Scientific Research
    • Society of Photo-optical Instrumentation Engineers

書誌事項

Laser applications in microelectronic and optoelectronic manufacturing V : 24-26 January 2000, San Jose, USA

Henry Helvajian, ... [et al.], chairs/editors ; sponsored by AFOSR--U.S. Air Force Office of Scientific Research, SPIE--the International Society for Optical Engineering

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 3933）

SPIE, c2000

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注記

Includes bibliographic references and author index

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  • Proceedings

    SPIE -- the International Society for Optical Engineering

    SPIE -- the International Society for Optical Engineering

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