Micromachining and microfabrication process technology II : 14-15 October, 1996, Austin, Texas

Author(s)

• Pang, Stella W.
• Chang, Shih-Chia
• Society of Photo-optical Instrumentation Engineers
• Semiconductor Equipment and Materials International
• National Institute of Standards and Technology (U.S.)

Bibliographic Information

Micromachining and microfabrication process technology II : 14-15 October, 1996, Austin, Texas

Stella W. Pang, Shih-Chia Chang, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering, SEMI--Semiconductor Equipment and Materials International, NIST--National Institute of Standards and Technology ; cooperating organizations, Solid State Technology, Sandia National Laboratories

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 2879）

SPIE--The International Society of Optical Engineering, c1996

Details

• NCID: BA61047748
• ISBN:
  • 0819422770
• LCCN: 96069473
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Bellingham, Wash.
• Pages/Volumes: ix, 366 p.
• Size: 28 cm
• Classification:
  • LCC : TJ1191.5
  • DC21 : 621.3815/2
• Subject Headings:
  • LCSH : Micromachining -- Congresses
  • LCSH : Microfabrication -- Congresses
  • LCSH : Electromechanical devices -- Design and construction -- Congresses
• Parent Bibliography ID:
  • BA0022700X