Micromachining and microfabrication process technology II : 14-15 October, 1996, Austin, Texas
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National Institute of Standards and Technology (U.S.)
Author(s)
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National Institute of Standards and Technology (U.S.)
Bibliographic Information
Micromachining and microfabrication process technology II : 14-15 October, 1996, Austin, Texas
Stella W. Pang, Shih-Chia Chang, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering, SEMI--Semiconductor Equipment and Materials International, NIST--National Institute of Standards and Technology ; cooperating organizations, Solid State Technology, Sandia National Laboratories
(Proceedings / SPIE -- the International Society for Optical Engineering, v. 2879)
SPIE--The International Society of Optical Engineering, c1996
Available at / 3 libraries
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Proceedings
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SPIE -- the International Society for Optical Engineering
SPIE -- the International Society for Optical Engineering