Micromachining and microfabrication process technology III : 29-30 September, 1997, Austin, Texas

著者

• Chang, Shih-Chia
• Pang, Stella W.
• Society of Photo-optical Instrumentation Engineers
• Semiconductor Equipment and Materials International
• United States. National Institute of Standards and Technology

書誌事項

Micromachining and microfabrication process technology III : 29-30 September, 1997, Austin, Texas

Shih-Chia Chang, Stella W. Pang, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering, SEMI--Semiconductor Equipment and Materials International, [and] NIST--National Institute of Standards and Technology ; cooperating organization, Solid State Technology

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 3223）

SPIE, c1997

注記

Includes bibliographical references and index

詳細情報

• NII書誌ID(NCID): BA61051858
• ISBN:
  • 0819426555
• LCCN: 98122577
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: ang
• 出版地: Bellingham, Wash.
• ページ数/冊数: ix, 310 p.
• 大きさ: 28 cm
• 分類:
  • LCC : TJ1191.5
  • DC21 : 621.3815/2
• 件名:
  • LCSH : Micromachining -- Congresses
  • LCSH : Microfabrication -- Congresses
  • LCSH : Electromechanical devices -- Design and construction -- Congresses
• 親書誌ID:
  • BA0022700X