Micromachining and microfabrication process technology V : 20-22 September, 1999, Santa Clara, California

Author(s)

• Smith, James H.
• Karam, Jean-Michel
• Society of Photo-optical Instrumentation Engineers
• Solid State Technology (Organization)

Bibliographic Information

Micromachining and microfabrication process technology V : 20-22 September, 1999, Santa Clara, California

James H. Smith, Jean-Michel Karam, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, SolidState Technology ... [et al.]

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 3874）

SPIE, c1999

Note

Includes bibliographic references and author index

Description and Table of Contents

Description

A selection of 45 papers on the process technology of microfabrication and micromachining.

by "Nielsen BookData"

Details

• NCID: BA61055032
• ISBN:
  • 081943471X
• LCCN: 00266008
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Bellingham, Wash.
• Pages/Volumes: x, 434 p.
• Size: 28 cm
• Classification:
  • LCC : TJ1191.5
  • DC21 : 621.3815/2
• Subject Headings:
  • LCSH : Micromachining Congresses
  • LCSH : Microfabrication Congresses
  • LCSH : Electromechanical devices -- Design and construction Congresses
• Parent Bibliography ID:
  • BA0022700X