Micromachining and microfabrication process technology V : 20-22 September, 1999, Santa Clara, California

著者

• Smith, James H.
• Karam, Jean-Michel
• Society of Photo-optical Instrumentation Engineers
• Solid State Technology (Organization)

書誌事項

Micromachining and microfabrication process technology V : 20-22 September, 1999, Santa Clara, California

James H. Smith, Jean-Michel Karam, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, SolidState Technology ... [et al.]

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 3874）

SPIE, c1999

注記

Includes bibliographic references and author index

内容説明・目次

内容説明

A selection of 45 papers on the process technology of microfabrication and micromachining.

「Nielsen BookData」 より

詳細情報

• NII書誌ID(NCID): BA61055032
• ISBN:
  • 081943471X
• LCCN: 00266008
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Bellingham, Wash.
• ページ数/冊数: x, 434 p.
• 大きさ: 28 cm
• 分類:
  • LCC : TJ1191.5
  • DC21 : 621.3815/2
• 件名:
  • LCSH : Micromachining Congresses
  • LCSH : Microfabrication Congresses
  • LCSH : Electromechanical devices -- Design and construction Congresses
• 親書誌ID:
  • BA0022700X