MEMS design, fabrication, characterization, and packaging : 30 May-1 June 2001, Edinburgh, UK

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MEMS design, fabrication, characterization, and packaging : 30 May-1 June 2001, Edinburgh, UK

Uwe F. W. Behringer, Deepak G. Uttamchandani, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering ; cosponsored by Scottish Enterprise (UK) ; cooperating organizations, EOS--European Optical Society [and] IEE--the Institution of Electrical Engineers (UK)

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 4407）

SPIE, c2001

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Includes bibliographical references and index

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  • Proceedings

    SPIE -- the International Society for Optical Engineering

    SPIE -- the International Society for Optical Engineering

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