Lecture notes on principles of plasma processing

Author(s)

• Chen, Francis F.
• Chang, Jane P.

Bibliographic Information

Lecture notes on principles of plasma processing

Francis F. Chen and Jane P. Chang

Kluwer Academic/Plenum Publishers, c2003

Details

• NCID: BA61392702
• ISBN:
  • 0306474972
• LCCN: 2002040665
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: New York
• Pages/Volumes: ix, 208 p
• Size: 28 cm
• Attached Material: 1 CD-ROM
• Classification:
  • DC21 : 621.044
• Subject Headings:
  • LCSH : Plasma engineering
  • LCSH : Plasma chemistry
  • LCSH : Plasma dynamics