Gettering and deffect engineering in semiconductor technology : GADEST '99 : proceedings of the 8th International Autumn Meeting : Höör, Schweden, September 25-28 1999

著者

• International Autumn Meeting, Gettering and Defect Engineering in Semiconductor Technology
• Grimmeiss, H.G.
• Ask, L.
• Kleverman, M.
• Kittler, M.
• Richter, H.

書誌事項

Gettering and deffect engineering in semiconductor technology : GADEST '99 : proceedings of the 8th International Autumn Meeting : Höör, Schweden, September 25-28 1999

editors, H.G. Grimmeiss, L.Ask, M.Kleverman, M.Kittler and H.Richter

（Diffusion and defect data : solid state data, Pt. B . Solid state phenomena ; v. 69 - 70）

Scitec Publications, c1999

詳細情報

• NII書誌ID(NCID): BA62025401
• 出版国コード: sz
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Switzerland
• ページ数/冊数: 610 p.
• 大きさ: 25 cm
• 親書誌ID:
  • BA07841800