2003 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop : "Advancing the science of semiconductor manufacturing excellence" : ASMC 2003 proceedings, 31 March-1 April, 2003, Munich, Germany

書誌事項

2003 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop : "Advancing the science of semiconductor manufacturing excellence" : ASMC 2003 proceedings, 31 March-1 April, 2003, Munich, Germany

IEEE Service Center, c2003

タイトル別名

ASMC 2003 proceedings, 14th annual Advanced Semiconductor Manufacturing Conference and Workshop

03CH37406

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注記

Includes bibliographical references

"IEEE catalog number 03CH37406"--on cover

詳細情報

  • NII書誌ID(NCID)
    BA62834249
  • ISBN
    • 0780376730
  • 出版国コード
    us
  • タイトル言語コード
    eng
  • 本文言語コード
    eng
  • 出版地
    Piscataway, NJ
  • ページ数/冊数
    iv, 330 p.
  • 大きさ
    30 cm
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