X-ray diffuse scattering from self-organized mesoscopic semiconductor structures
著者
書誌事項
X-ray diffuse scattering from self-organized mesoscopic semiconductor structures
（Springer tracts in modern physics : Ergebnisse der exakten Naturwissenschaften / editor, G. Höhler, v. 199 . Solid-state physics / editors,
Springer, c2004
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注記
"Physics and astronomy online library" -- P. facing t.p
Includes bibliographical references and index
内容説明・目次
内容説明
This monograph represents a critical survey of the outstanding capabilities of X-ray
diffuse scattering for the structural characterization of mesoscopic material systems. The mesoscopic regime comprises length scales ranging from a few up to some hundreds of nanometers. It is of particular relevance at semiconductor layer systems where, for example, interface roughness or low-dimensional objects such as quantum dots and quantum wires have attracted much interest. An extensive overview of the present state-of-the-art theory of X-ray diffuse scattering at mesoscopic structures is given followed by a valuable description of various experimental techniques. Selected up-to-date examples are discussed. The aim of the present book is to combine aspects of self-organized growth of mesoscopic structures with corresponding X-ray diffuse scattering experiments.
目次
A Brief Introduction to the Topic.- Basic Principles of X-Ray Diffuse Scattering on Mesoscopic Structures.- Experimental Optimization.- A Model System: LPE SiGe/Si(001) Islands.- Dynamical Scattering at Grazing Incidence.- Characterization of Quantum Dots.- Characterization of Interface Roughness.- Appendix.
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