Materials, Technology and Reliability for Advanced Interconnects and Low-k Dielectrics-2003 : symposium held April 21-25, 2003, San Francisco, California, U.S.A.

著者

• Materials, Technology and Reliability for Advanced Interconnects and Low-k Dielectrics
• Materials Research Society
• McKerrow, Andrew J.
• Leu, Jihperng (Jim)
• Kraft, Oliver
• Kikkawa, Takamaro

書誌事項

Materials, Technology and Reliability for Advanced Interconnects and Low-k Dielectrics-2003 : symposium held April 21-25, 2003, San Francisco, California, U.S.A.

editors, Andrew J. McKerrow ... [et al.]

（Materials Research Society symposium proceedings, v. 766）

Materials Research Society, c2003

注記

Includes bibliographical references and indexes

詳細情報

• NII書誌ID(NCID): BA65639421
• ISBN:
  • 1558997032
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Warrendale, Pa.
• ページ数/冊数: xv, 515 p.
• 大きさ: 24 cm
• 親書誌ID:
  • BA00013775