2003 IEEE International Symposium on Semiconductor Manufacturing conference proceedings, September 30-October 2,2003, San Jose, California

Author(s)

• IEEE International Symposium on Semiconductor Manufacturing
• Institute of Electrical and Electronics Engineers
• IEEE Electron Devices Society
• Components, Packaging & Manufacturing Technology Society
• Semiconductor Equipment and Materials International
• 応用物理学会 オウヨウ ブツリ ガッカイ

Bibliographic Information

2003 IEEE International Symposium on Semiconductor Manufacturing conference proceedings, September 30-October 2,2003, San Jose, California

[sponsored by IEEE Electron Devices Society, IEEE Components Packaging and Manufacturing Technology Society, Semiconductor Equipment & Materials International (SEMI), and Society of Applied Physics of Japan]

IEEE Service Center, c2003

• : softbound

Other Title

03CH37462

2003 IEEE International Symposium on Semiconductor Manufacturing, ISSM 2003, conference proceedings, September 30-October 2, 2003, San Jose, California

Note

Includes bibliographical references

"IEEE catalog number 03CH37462"--T.p. verso

Details

• NCID: BA65999008
• ISBN:
  • 0780378946
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Piscataway, N.J.
• Pages/Volumes: x, 521 p.
• Size: 28 cm