2003 8th International Symposium on Plasma- and Process-Induced Damage, April 24-25, 2003, Corbeil-Essonnes, France
Author(s)
Bibliographic Information
2003 8th International Symposium on Plasma- and Process-Induced Damage, April 24-25, 2003, Corbeil-Essonnes, France
IEEE Operations Center, c2003
- Other Title
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P2ID
03TH8669
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Note
"P2ID"-- on cover
"IEEE Catalog Number 03TH8669" -- T.p. verso
Includes bibliographical references
Description and Table of Contents
Description
This text covers topics including; damage mechanism and modelling; antenna effect and process monitoring; high-K gate dielectric; and integration.
by "Nielsen BookData"
