Thin films : stresses and mechanical properties X : symposium held December 1-5, 2003, Boston, Massachusetts, U.S.A.
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Thin films : stresses and mechanical properties X : symposium held December 1-5, 2003, Boston, Massachusetts, U.S.A.
(Materials Research Society symposium proceedings, v. 795)
Materials Research Society, c2004
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Thin films : stresses and mechanical properties 10
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