Thin film materials technology : sputtering of compound materials
著者
書誌事項
Thin film materials technology : sputtering of compound materials
William Andrew Pub., c2004 , Springer
- : William Andrew
- : Springer
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注記
Includes bibliographical references and index
内容説明・目次
- 巻冊次
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: William Andrew ISBN 9780815514831
内容説明
An invaluable resource for industrial science and engineering newcomers to sputter deposition technology in thin film production applications, this book is rich in coverage of both historical developments and the newest experimental and technological information about ceramic thin films, a key technology for nano-materials in high-speed information applications and large-area functional coating such as automotive or decorative painting of plastic parts, among other topics. In seven concise chapters, the book thoroughly reviews basic thin film technology and deposition processes, sputtering processes, structural control of compound thin films, and microfabrication by sputtering.
- 巻冊次
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: Springer ISBN 9783540211181
内容説明
An invaluable resource for industrial science and engineering newcomers to sputter deposition technology in thin film production applications, this book is rich in coverage of both historical developments and the newest experimental and technological information about ceramic thin film, a key technology for nano-materials in high-speed information applications and large-area functional coating such as automotive or decorative painting of plastic parts. The key topics include: Principles and examples of making thin-film materials and devices such as nanometer composite thin films, nanometer superlattice of compound ceramics, micro-sensors and actuators, micro-MEMS, mobile compact/flexible ferroelectric memory, flat display including plasma display and PLD, and thin film catalysis, solar battery, and large-area functional window glass coating for energy and environmental uses. It covers techniques in automotive parts coatings :non-peel plastics coatings with metal, alloy, and compound films.
目次
Thin Film Materials And Devices.- Thin Film Processes.- Sputtering Phenomena.- Sputtering Systems.- Deposition Of Compound Thin Films.- Structural Control Of Compound Thin Films.- Microfabrication By Sputtering.- Appendix.- Index.
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