Advanced short-time thermal processing for Si-based CMOS devices : proceedings of the international symposium

著者

• Roozeboom, Fred
• Electrochemical Society. Electronics Division
• Electrochemical Society. Dielectric Science and Technology Division
• Electrochemical Society. High Temperature Materials Division

書誌事項

Advanced short-time thermal processing for Si-based CMOS devices : proceedings of the international symposium

editors, F. Roozeboom ... [et al.]

（Proceedings / [Electrochemical Society], v. 2003-14, 2004-01）

Electrochemical Society, c2003-2004

• [I]
• II

注記

Includes bibliographical references and indexes

詳細情報

• NII書誌ID(NCID): BA69491300
• ISBN:
  • 1566773962
  • 1566774063
• LCCN: 2003110354
• LCCN: 2004102296
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Pennington, NJ
• ページ数/冊数: 2 v.
• 大きさ: 24 cm
• 親書誌ID:
  • BA01323290