2004 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop : "Advancing the science and technology of semiconductor manufacturing excellence" : ASMC 2004 proceedings, May 4-6, 2004, Boston, Massachusetts, USA

著者

• IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop
• Institute of Electrical and Electronics Engineers
• Semiconductor Equipment and Materials International

書誌事項

2004 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop : "Advancing the science and technology of semiconductor manufacturing excellence" : ASMC 2004 proceedings, May 4-6, 2004, Boston, Massachusetts, USA

IEEE Operations Center, c2004

タイトル別名

ASMC 2004 proceedings, 15th annual Advanced Semiconductor Manufacturing Conference and Workshop

注記

Includes bibliographical references

"IEEE catalog number 04CH37530"--on cover

詳細情報

• NII書誌ID(NCID): BA6951924X
• ISBN:
  • 0780383125
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Piscataway, NJ
• ページ数/冊数: xi, 507 p.
• 大きさ: 28 cm