Introduction to microelectromechanical microwave systems
著者
書誌事項
Introduction to microelectromechanical microwave systems
(MEMS--Microelectromechanical systems series)
Artech House, c2004
2nd ed
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注記
Includes bibliographical references and index
内容説明・目次
内容説明
Microelectromechanical microwave systems are the micro-sized devices that are poised to be the next big thing in wireless and satellite communications. These systems are the product of integrated circuit technology, mechanical engineering, materials science, and microwave communications. This updated edition to an Artech House bestseller brings together all the principles, techniques, methods, and theories from these different fields to provide professionals with a full, all-encompassing introduction to microelectromechanical microwave systems. The second edition covers the latest in fabrication technologies, design, architecture, testing, and applications. The book explains how these systems can reduce equipment size, weight, and cost, how to determine which applications can benefit most from these systems, and how they can improve communication systems performance.
目次
Microelectromechanical Systems. Fundamental MEMS Device Physics. Fundamental MEMS Devices: The MEMS Switch. Fundamental MEMS Devices: The MEM Resonator. Microwave MEMS Applications. MEMS-Based Microwave Circuits and Systems.
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