Stress-induced phenomena in metallization : seventh international workshop on stress-induced phenomena in metallization : Austin, Texas, 14-16 June 2004
著者
書誌事項
Stress-induced phenomena in metallization : seventh international workshop on stress-induced phenomena in metallization : Austin, Texas, 14-16 June 2004
(AIP conference proceedings, 741)
American Institute of Physics, c2004
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注記
Another editors: Shefford P. Baker, Tomoji Nakamura, Cynthia A. Volkert
Includes indexes
内容説明・目次
内容説明
These proceedings contain new research results and advances in basic understanding of stress-induced phenomena in metallization. Papers cover results on electromigration, thermal stresses and void formation in copper-low k interconnect structures.
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