Morphological evolution of electrodeposits -and- electrochemical processing in ULSI fabrication and electrodeposition of and on semiconductors IV : proceedings of the international symposia

著者

• Electrochemical Society. Meeting
• Electrochemical Society. Electrodeposition Division
• Electrochemical Society. Dielectric Science and Technology Division
• Electrochemical Society. Electronics Division

書誌事項

Morphological evolution of electrodeposits -and- electrochemical processing in ULSI fabrication and electrodeposition of and on semiconductors IV : proceedings of the international symposia

editors, K. Kondo ... [et al.] ; sponsoring divisions, Electrodeposition, Dielectric Science and Technology, Electronics

（Proceedings / [Electrochemical Society], v. 2001-08）

Electrochemical Society, c2005

注記

"...were held during the 2001 Spring Meeting of the Electrochemical Soeity in Washington, D. C., the 198th meeting"--on pref.

Includes bibliographical references and indexes

詳細情報

• NII書誌ID(NCID): BA73943199
• LCCN: 2004112427
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Pennington, N.J.
• ページ数/冊数: ix, 406 p.
• 大きさ: 24 cm
• 親書誌ID:
  • BA01323290