Crystalline defects and contamination: their impact and control in device manufacturing IV : DECON 2005 : proceedings of the Satellite Symposium to ESSDERC 2005, Grenoble, France

著者

• Symposium on Crystalline Defects and Contamination: their Impact and Control in Device Manufacturing
• Kolbesen, Bernd O.
• European Solid State Device Research Conference

書誌事項

Crystalline defects and contamination: their impact and control in device manufacturing IV : DECON 2005 : proceedings of the Satellite Symposium to ESSDERC 2005, Grenoble, France

editors, Bernd O. Kolbesen ... [et al.] ; sponsoring division, Electronics and Photonics

（Proceedings / [Electrochemical Society], v. 2005-10）

Electrochemical Society, c2005

注記

Includes bibliographic references and indexes

詳細情報

• NII書誌ID(NCID): BA74394959
• ISBN:
  • 1566774284
• LCCN: 2005929601
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Pennington, N.J.
• ページ数/冊数: viii, 190 p.
• 大きさ: 24 cm
• 親書誌ID:
  • BA01323290