Principles of physical vapor deposition of thin films
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書誌事項
Principles of physical vapor deposition of thin films
Elsevier, 2006
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注記
Includes bibliographical references and index
内容説明・目次
内容説明
The goal of producing devices that are smaller, faster, more functional, reproducible, reliable and economical has given thin film processing a unique role in technology.Principles of Vapor Deposition of Thin Films brings in to one place a diverse amount of scientific background that is considered essential to become knowledgeable in thin film depostition techniques. Its ultimate goal as a reference is to provide the foundation upon which thin film science and technological innovation are possible.
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