MEMS/NEMS : handbook techniques and applications

書誌事項

MEMS/NEMS : handbook techniques and applications

edited by Cornelius T. Leondes

Springer, c2006

  • : [set]
  • v. 1
  • v. 2
  • v. 3
  • v. 4
  • v. 5

タイトル別名

MEMS/NEMS handbook : techniques and appplications

大学図書館所蔵 件 / 5

この図書・雑誌をさがす

注記

Includes bibliographical references and index

収録内容

  • v. 1. Design methods
  • v. 2. Fabrication techniques
  • v. 3. Manufacturing methods
  • v. 4. Sensors and actuators
  • v. 5. Medical applications and MOEMS

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