Design, test, integration, and packaging of MEMS/MOEMS 2001 : 25-27 April 2001, Cannes, France

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Design, test, integration, and packaging of MEMS/MOEMS 2001 : 25-27 April 2001, Cannes, France

Bernard Courtois ... [et al.] chairs/editors ; sponsored by CNRS-INPG-UJF (France) ... [et al.]

(Proceedings / SPIE -- the International Society for Optical Engineering, v. 4408)

SPIE, c2001

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Includes bibliographic references and author index

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