Design, test, integration, and packaging of MEMS/MOEMS 2001 : 25-27 April 2001, Cannes, France

著者

• Courtois, B. (Bernard)

書誌事項

Design, test, integration, and packaging of MEMS/MOEMS 2001 : 25-27 April 2001, Cannes, France

Bernard Courtois ... [et al.] chairs/editors ; sponsored by CNRS-INPG-UJF (France) ... [et al.]

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 4408）

SPIE, c2001

注記

Includes bibliographic references and author index

詳細情報

• NII書誌ID(NCID): BA80136947
• ISBN:
  • 0819441090
• LCCN: 2002265434
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Bellingham, Washington
• ページ数/冊数: xvi, 558 p.
• 大きさ: 28 cm
• 分類:
  • LCC : TK7875
  • DC21 : 621.381
• 件名:
  • LCSH : Microelectromechanical systems -- Congresses
  • LCSH : Optoelectronic devices -- Congresses
  • LCSH : Micromachining -- Congresses
  • LCSH : Microelectronic packaging -- Congresses
• 親書誌ID:
  • BA0022700X