Atomic layer deposition : at the 208th ECS Meeting, October 16-21, 2005, Los Angeles, California, USA

Author(s)

• Electrochemical Society. Meeting
• Electrochemical Society
• Londergan, A. R.

Bibliographic Information

Atomic layer deposition : at the 208th ECS Meeting, October 16-21, 2005, Los Angeles, California, USA

[editors, A. R. Londergan ... [et al.]]

（ECS transactions, vol. 1, no. 10）

The Electrochemical Society, c2006

Note

Includes bibliographical references and indexes

Details

• NCID: BA81203143
• ISBN:
  • 1566774438
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Pennington, N.J.
• Pages/Volumes: 144 p.
• Size: 23 cm
• Parent Bibliography ID:
  • BA78566502