Silicon nitride, silicon dioxide, and emerging dielectrics 9

Author(s)

• Electrochemical Society. Meeting
• Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films
• Sah, R. Ekwal

Bibliographic Information

Silicon nitride, silicon dioxide, and emerging dielectrics 9

editors, R. Ekwal Sah ... [et al.]

（ECS transactions, vol. 6, no. 3）

Electrochemical Society, c2007

Note

"... contains the proceedings of the Symposium on Silicon Nitride, Silicon Dioxide Thin Insulating Films, and Emerging Dielectrics to be held May 6-11, 2007 in Chicago as a part of the 211th Meeting of The Electrochemical Society (ECS)"--on pref.

Details

• NCID: BA82032137
• ISBN:
  • 9781566775526
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Pennington, N.J.
• Pages/Volumes: xii, 847 p.
• Size: 23 cm
• Parent Bibliography ID:
  • BA78566502