Silicon nitride, silicon dioxide, and emerging dielectrics 9
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Silicon nitride, silicon dioxide, and emerging dielectrics 9
(ECS transactions, vol. 6,
Electrochemical Society, c2007
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"... contains the proceedings of the Symposium on Silicon Nitride, Silicon Dioxide Thin Insulating Films, and Emerging Dielectrics to be held May 6-11, 2007 in Chicago as a part of the 211th Meeting of The Electrochemical Society (ECS)"--on pref.