Silicon nitride, silicon dioxide, and emerging dielectrics 9

著者

• Electrochemical Society. Meeting
• Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films
• Sah, R. Ekwal

書誌事項

Silicon nitride, silicon dioxide, and emerging dielectrics 9

editors, R. Ekwal Sah ... [et al.]

（ECS transactions, vol. 6, no. 3）

Electrochemical Society, c2007

注記

"... contains the proceedings of the Symposium on Silicon Nitride, Silicon Dioxide Thin Insulating Films, and Emerging Dielectrics to be held May 6-11, 2007 in Chicago as a part of the 211th Meeting of The Electrochemical Society (ECS)"--on pref.

詳細情報

• NII書誌ID(NCID): BA82032137
• ISBN:
  • 9781566775526
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Pennington, N.J.
• ページ数/冊数: xii, 847 p.
• 大きさ: 23 cm
• 親書誌ID:
  • BA78566502