Advanced gate stack, source/drain and channel engineering for Si-based CMOS 3 : new materials, processes and equipment
著者
書誌事項
Advanced gate stack, source/drain and channel engineering for Si-based CMOS 3 : new materials, processes and equipment
(ECS transactions, vol. 6,
Electrochemical Society, c2007
大学図書館所蔵 件 / 全1件
-
該当する所蔵館はありません
- すべての絞り込み条件を解除する
注記
Includes bibliographical references and indexes
"The international symposium on Advanced Gate Stack, Source/Drain and Channel Engineering for Si-based CMOS: New Materials, Prosesses and Equipment, 3 will be held in May 6-10, 2007 in Chicago, the financial, business, and cultural capital of the Midwest as a part of the 211th Meeting of the Electrochemical Society" -- iii p.