ULSI process integration 5
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書誌事項
ULSI process integration 5
(ECS transactions, vol. 11,
Electrochemical Society, c2007
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注記
Includes bibliographical references and index
Papers presented at the 5th Symposium on ULSI Process Integration at the 212th Meeting of the Electrochemical Society, Washington D.C., October 7-12, 2007