Analytical and diagnostic techniques for semiconductor materials, devices and processes 7

Author(s)

• Analytical and Diagnostic Techniques for Semiconductor Materials, Devices, and Processes
• Schroder, D. K.
• Electrochemical Society. Meeting
• Electrochemical Society. Electronics and Photonics
• Electrochemical Society. Dielectric Science and Technology Division
• European Solid State Device Research Conference

Bibliographic Information

Analytical and diagnostic techniques for semiconductor materials, devices and processes 7

editors, D. K. Schroder ... [et al.]. ; sponsoring divisions, Electronics and Photonics, Dielectric Science & Technology

（ECS transactions, vol. 11, no. 3）

Electrochemical Society, c2007

• : CD-ROM

Other Title

Analytical Techniques for Semiconductor Materials and Process Characterization

ALTECH

Note

"... was part of the Fall 2007 Electrochemical Society Meeting in Washington, DC, held on October 7-12, 2007."--on pref

"... also contains a CD-ROM with the papers of the ALTECH 07 symposium Analytical Techniques for Semiconductor Materials and Process Characterization V, held as part of the Solid State Device Research Conference (ESSDERC) 2007 in Munich, Germany on September 13-14, 2007."--on pref

Includes bibliographical references and indexes

Details

• NCID: BA84582092
• ISBN:
  • 9781566775694
  • 9781566775793
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Pennington, N.J.
• Pages/Volumes: viii, 394 p.
• Size: 23 cm
• Attached Material: 1 CD-ROM
• Classification:
  • LCC : QD139.S44
  • DC21 : 621.3815/2
• Subject Headings:
  • LCSH : Semiconductors -- Analysis Congresses
• Parent Bibliography ID:
  • BA78566502