Analytical and diagnostic techniques for semiconductor materials, devices and processes 7

著者

• Analytical and Diagnostic Techniques for Semiconductor Materials, Devices, and Processes
• Schroder, D. K.
• Electrochemical Society. Meeting
• Electrochemical Society. Electronics and Photonics
• Electrochemical Society. Dielectric Science and Technology Division
• European Solid State Device Research Conference

書誌事項

Analytical and diagnostic techniques for semiconductor materials, devices and processes 7

editors, D. K. Schroder ... [et al.]. ; sponsoring divisions, Electronics and Photonics, Dielectric Science & Technology

（ECS transactions, vol. 11, no. 3）

Electrochemical Society, c2007

• : CD-ROM

タイトル別名

Analytical Techniques for Semiconductor Materials and Process Characterization

ALTECH

注記

"... was part of the Fall 2007 Electrochemical Society Meeting in Washington, DC, held on October 7-12, 2007."--on pref

"... also contains a CD-ROM with the papers of the ALTECH 07 symposium Analytical Techniques for Semiconductor Materials and Process Characterization V, held as part of the Solid State Device Research Conference (ESSDERC) 2007 in Munich, Germany on September 13-14, 2007."--on pref

Includes bibliographical references and indexes

詳細情報

• NII書誌ID(NCID): BA84582092
• ISBN:
  • 9781566775694
  • 9781566775793
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Pennington, N.J.
• ページ数/冊数: viii, 394 p.
• 大きさ: 23 cm
• 付属資料: 1 CD-ROM
• 分類:
  • LCC : QD139.S44
  • DC21 : 621.3815/2
• 件名:
  • LCSH : Semiconductors -- Analysis Congresses
• 親書誌ID:
  • BA78566502