Proceedings of the Symposium on Silicon Nitride Thin Insulating Films

著者

• Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films
• Kapoor, Vikram J.
• Stein, Herman J.
• Electrochemical Society. Dielectrics and Insulation Division
• Electrochemical Society. Electronics Division

書誌事項

Proceedings of the Symposium on Silicon Nitride Thin Insulating Films

edited by Vikram J. Kapoor, Herman J. Stein ; [sponsored by] Dielectrics and Insulation and Electronics Divisions

（Proceedings / [Electrochemical Society], v. 83-8）

Electrochemical Society, c1983

タイトル別名

Silicon nitride thin insulating films

注記

Includes bibliographical references and index

"... held May 11-13, 1983 in San Francisco, California" -- on pref

詳細情報

• NII書誌ID(NCID): BA84901871
• LCCN: 83082039
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Pennington, N.J.
• ページ数/冊数: ix, 519 p.
• 大きさ: 23 cm
• 分類:
  • LCC : TK7872.T55
  • DC19 : 621.381/7
• 件名:
  • LCSH : Thin film devices -- Congresses
  • LCSH : Silicon nitride -- Congresses
• 親書誌ID:
  • BA01323290