Proceedings of the Fifth Symposium on Plasma Processing

著者

• Symposium on Plasma Processing
• Mathad, G. S.
• Schwartz, G. C.
• Smolinsky, G.
• Electrochemical Society. Dielectrics and Insulation Division
• Electrochemical Society. Electronics Division

書誌事項

Proceedings of the Fifth Symposium on Plasma Processing

edited by G.S. Mathad, G.C. Schwartz, G. Smolinsky

（Proceedings / [Electrochemical Society], v. 85-1）

Electrochemical Society, c1985

タイトル別名

Plasma processing

Proceedings of the 5th Symposium on Plasma Processing

注記

Includes bibliographical references and indexes

"... held during the fall meeting of the Electrochemical Society, Inc., October 7-14, 1984 in New Orleans, La." -- on pref

Sponsored by: Dielectrics & Insulation and Electronics Divisions

詳細情報

• NII書誌ID(NCID): BA84917678
• LCCN: 85070593
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Pennington, NJ
• ページ数/冊数: x, 619 p.
• 大きさ: 23 cm
• 分類:
  • LCC : TK7871.85
  • DC19 : 621.3815/2
• 件名:
  • LCSH : Plasma etching -- Congresses
  • LCSH : Semiconductors -- Etching -- Congresses
• 親書誌ID:
  • BA01323290