Proceedings of the Symposium on Laser Processes for Microelectronic Applications

著者

• Symposium on Laser Processes for Microelectronic Applications
• Ritsko, J. J.
• Ehrlich, Daniel J.
• 柏木, 正弘 カシワギ, マサヒロ
• Electrochemical Society. Dielectrics and Insulation Division
• Electrochemical Society. Electronics Division

書誌事項

Proceedings of the Symposium on Laser Processes for Microelectronic Applications

edited by J.J. Ritsko, D.J. Ehrlich, M. Kashiwagi

（Proceedings / [Electrochemical Society], v. 88-10）

Electrochemical Society, c1988

タイトル別名

Laser processes for microelectronic applications

注記

Includes bibliographical references and index

"... held in Honolulu, Hawaii, October 21-22, 1987" -- on pref

"Dielectrics and Insulation and Electronics Divisions"

詳細情報

• NII書誌ID(NCID): BA84957071
• LCCN: 88080925
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Pennington, NJ
• ページ数/冊数: vii, 251 p.
• 大きさ: 23 cm
• 分類:
  • LCC : TK7874
  • DC19 : 621.381/7
• 件名:
  • LCSH : Microelectronics -- Congresses
  • LCSH : Lasers -- Industrial applications -- Congresses
• 親書誌ID:
  • BA01323290